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Absolute Pitch, Roll and Yaw Measurement on CMOS

Abstract : This paper presents a unique combination of magnetic and inertial sensors on a fully monolithic CMOS chip. Pitch and roll are measured using two identical heat transfer based tilt sensors while yaw is derived from an original electromechanical compass. For complete 3-D positioning, the use of an additional z-axis piezoresistive accelerometer is also investigated. Contrary to systems based on gyroscopes, the proposed device outputs the absolute values of the three Euler's angles. All sensors (i.e. the magnetometers, the thermal tilt sensors, and the z-axis accelerometer) are fabricated simultaneously using a cheap one-step auto-aligned post process (Front Side Bulk Micromachining), thus addressing consumer markets for very low-cost applications.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00154128
Contributor : Frédérick Mailly <>
Submitted on : Tuesday, June 12, 2007 - 6:04:58 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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  • HAL Id : lirmm-00154128, version 1

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Aboubacar Chaehoi, Norbert Dumas, Frédérick Mailly, Laurent Latorre, Pascal Nouet. Absolute Pitch, Roll and Yaw Measurement on CMOS. 4th IEEE Conference on Sensors, Oct 2005, Irvine, CA (USA), pp.133-136. ⟨lirmm-00154128⟩

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