On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Papers Year : 2002

On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems

Abstract

This paper introduces the use of the oscillation test technique for MEMS testing. This well-known test technique is here adapted to MEMS. Its efficiency is evaluated based on a case study: A CMOS electromechanical magnetometer.

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Micro and nanotechnologies/Microelectronics

Christine Carvalho De Matos  : Connect in order to contact the contributor

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00268488

Submitted on : Tuesday, April 1, 2008-9:27:30 AM

Last modification on : Friday, March 24, 2023-2:52:50 PM

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lirmm-00268488 , version 1 (01-04-2008)

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Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet. On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems. DATE: Design, Automation and Test in Europe, Mar 2002, Paris, France. pp.1120-1120, ⟨10.1109/DATE.2002.998476⟩. ⟨lirmm-00268488⟩

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