On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems

Abstract : This paper introduces the use of the oscillation test technique for MEMS testing. This well-known test technique is here adapted to MEMS. Its efficiency is evaluated based on a case study: A CMOS electromechanical magnetometer.
Type de document :
Communication dans un congrès
DATE: Design, Automation and Test in Europe, Mar 2002, Paris, France. Proceedings 2002 Design, Automation and Test in Europe Conference and Exhibition, pp.1120-1120, 2002, 〈https://www.date-conference.com/date10/〉. 〈10.1109/DATE.2002.998476〉
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Contributeur : Christine Carvalho de Matos <>
Soumis le : mardi 1 avril 2008 - 09:27:30
Dernière modification le : jeudi 24 mai 2018 - 15:59:24

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Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet. On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems. DATE: Design, Automation and Test in Europe, Mar 2002, Paris, France. Proceedings 2002 Design, Automation and Test in Europe Conference and Exhibition, pp.1120-1120, 2002, 〈https://www.date-conference.com/date10/〉. 〈10.1109/DATE.2002.998476〉. 〈lirmm-00268488〉

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