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On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems

Abstract : This paper introduces the use of the oscillation test technique for MEMS testing. This well-known test technique is here adapted to MEMS. Its efficiency is evaluated based on a case study: A CMOS electromechanical magnetometer.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00268488
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Submitted on : Tuesday, April 1, 2008 - 9:27:30 AM
Last modification on : Monday, October 11, 2021 - 1:24:11 PM

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Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet. On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems. DATE: Design, Automation and Test in Europe, Mar 2002, Paris, France. pp.1120-1120, ⟨10.1109/DATE.2002.998476⟩. ⟨lirmm-00268488⟩

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