On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2002

On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems

Abstract

This paper introduces the use of the oscillation test technique for MEMS testing. This well-known test technique is here adapted to MEMS. Its efficiency is evaluated based on a case study: A CMOS electromechanical magnetometer.
No file

Dates and versions

lirmm-00268488 , version 1 (01-04-2008)

Identifiers

Cite

Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet. On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanichal Systems. DATE: Design, Automation and Test in Europe, Mar 2002, Paris, France. pp.1120-1120, ⟨10.1109/DATE.2002.998476⟩. ⟨lirmm-00268488⟩
52 View
0 Download

Altmetric

Share

Gmail Facebook X LinkedIn More