Impact of Low-K Intra-Layer Dielectrics on Integration - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2002
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lirmm-00268501 , version 1 (01-04-2008)

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  • HAL Id : lirmm-00268501 , version 1

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Denis Deschacht, Fabrice Huret. Impact of Low-K Intra-Layer Dielectrics on Integration. 9th IEEE Workshop on Signal Propagation on Interconnects, Pisa, Italy. pp.181-184. ⟨lirmm-00268501⟩
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