Impact of Low-K Intra-Layer Dielectrics on Integration - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Papers Year : 2002

Impact of Low-K Intra-Layer Dielectrics on Integration

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00268501

Submitted on : Tuesday, April 1, 2008-9:27:33 AM

Last modification on : Tuesday, August 27, 2024-12:40:28 PM

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lirmm-00268501 , version 1 (01-04-2008)

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  • HAL Id : lirmm-00268501 , version 1

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Denis Deschacht, Fabrice Huret. Impact of Low-K Intra-Layer Dielectrics on Integration. 9th IEEE Workshop on Signal Propagation on Interconnects, Pisa, Italy. pp.181-184. ⟨lirmm-00268501⟩

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