Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining

Complete list of metadatas

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00268582
Contributor : Christine Carvalho de Matos <>
Submitted on : Tuesday, April 1, 2008 - 9:27:53 AM
Last modification on : Wednesday, January 1, 2020 - 6:46:01 PM

Identifiers

Collections

Citation

Muriel Dardalhon, Vincent Beroulle, Laurent Latorre, Pascal Nouet, Guy Perez, et al.. Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining. Microelectronics Reliability, Elsevier, 2002, 42 (9-11), pp.1777-1782. ⟨10.1016/S0026-2714(02)00230-5⟩. ⟨lirmm-00268582⟩

Share

Metrics

Record views

200