Journal Articles
Microelectronics Reliability
Year : 2002
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00268582
Submitted on : Tuesday, April 1, 2008-9:27:53 AM
Last modification on : Friday, August 5, 2022-10:48:16 AM
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- HAL Id : lirmm-00268582 , version 1
- DOI : 10.1016/S0026-2714(02)00230-5
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Muriel Dardalhon, Vincent Beroulle, Laurent Latorre, Pascal Nouet, Guy Perez, et al.. Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining. Microelectronics Reliability, 2002, 42 (9-11), pp.1777-1782. ⟨10.1016/S0026-2714(02)00230-5⟩. ⟨lirmm-00268582⟩
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