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Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00268582
Contributor : Christine Carvalho de Matos <>
Submitted on : Tuesday, April 1, 2008 - 9:27:53 AM
Last modification on : Monday, March 30, 2020 - 9:36:04 AM

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Muriel Dardalhon, Vincent Beroulle, Laurent Latorre, Pascal Nouet, Guy Perez, et al.. Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining. Microelectronics Reliability, Elsevier, 2002, 42 (9-11), pp.1777-1782. ⟨10.1016/S0026-2714(02)00230-5⟩. ⟨lirmm-00268582⟩

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