Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Journal Articles Microelectronics Reliability Year : 2002

Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining

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Micro and nanotechnologies/Microelectronics

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00268582

Submitted on : Tuesday, April 1, 2008-9:27:53 AM

Last modification on : Thursday, April 4, 2024-6:22:25 PM

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lirmm-00268582 , version 1 (01-04-2008)

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Muriel Dardalhon, Vincent Beroulle, Laurent Latorre, Pascal Nouet, Guy Perez, et al.. Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining. Microelectronics Reliability, 2002, 42 (9-11), pp.1777-1782. ⟨10.1016/S0026-2714(02)00230-5⟩. ⟨lirmm-00268582⟩

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