Conference Papers
Year : 2002
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00269356
Submitted on : Wednesday, April 2, 2008-4:46:09 PM
Last modification on : Friday, March 24, 2023-2:52:50 PM
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- HAL Id : lirmm-00269356 , version 1
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Muriel Dardalhon, Marc-Olivier Dzeukou, Vincent Beroulle, Laurent Latorre, Pascal Nouet, et al.. Impact of Environmental Parameters on CMOS MEMS Structures. CANEUS, Aug 2002, Montreal, Canada. ⟨lirmm-00269356⟩
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