Low Noise CMOS Amplifier for a Piezoresistive Magnetic Field Sensor

Norbert Dumas 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : A two-axis MEMS magnetometer with integrated signal processing has been developed for a micro-compass application. The fabrication process is fully industrial and relies on bulk wet etching of CMOS dies. This technology offers cost- effective batch fabrication. Earth magnetic field measurement is achieved using piezoresistive gauges on a cantilever beam actuated by means of the Lorentz force. Due to low signal level available across the gauges, on-chip amplification with very high gain and low noise is then required. A fully differential amplifier based on a differential pair is suitable for this application. Circuit design approach is discussed in this paper. The obtained performances in terms of noise are compared to an instrumentation amplifier. Finally, a sensing resolution of 0.9 μT is demonstrated with such a differential amplifier instead of 2.1 μT resulting from standard-cell based instrumentation amplifier.
Type de document :
Communication dans un congrès
DCIS: Design of Circuits and Integrated Systems, Nov 2003, Ciudad Real, Spain. 18th International Conference on Design of Circuits and Integrated Systems, pp.639-644, 2003
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Norbert Dumas, Laurent Latorre, Pascal Nouet. Low Noise CMOS Amplifier for a Piezoresistive Magnetic Field Sensor. DCIS: Design of Circuits and Integrated Systems, Nov 2003, Ciudad Real, Spain. 18th International Conference on Design of Circuits and Integrated Systems, pp.639-644, 2003. 〈lirmm-00269472〉

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