HDL Modeling of Convective Accelerometers for System Design and Optimization

Abstract : This study concerns the integration of convective accelerometers on CMOS. The design approach is based on an HDL modeling of the sensing cell. The development of a monolithic system is then undertaken, using multi-domain simulations, within the microelectronics design environment. For illustration, the sensor equivalent input noise (i.e. the resolution) is computed for various readout circuitry configurations: a simple instrumentation amplifier, a customized low-noise amplifier and a chopper-stabilized amplifier with a track-and-hold signal demodulator. Finally, a noise equivalent acceleration below 1 mg/√Hz has been reached, which is interesting for applications in consumer electronics.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00282864
Contributor : Frédérick Mailly <>
Submitted on : Wednesday, May 28, 2008 - 3:51:35 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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Olivier Leman, Frédérick Mailly, Laurent Latorre, Pascal Nouet. HDL Modeling of Convective Accelerometers for System Design and Optimization. Sensors and Actuators A: Physical , Elsevier, 2008, 142, Issue 1, pp.178-184. ⟨10.1016/j.sna.2007.07.034⟩. ⟨lirmm-00282864⟩

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