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Article Dans Une Revue Sensors and Actuators A: Physical Année : 2008

HDL Modeling of Convective Accelerometers for System Design and Optimization

Résumé

This study concerns the integration of convective accelerometers on CMOS. The design approach is based on an HDL modeling of the sensing cell. The development of a monolithic system is then undertaken, using multi-domain simulations, within the microelectronics design environment. For illustration, the sensor equivalent input noise (i.e. the resolution) is computed for various readout circuitry configurations: a simple instrumentation amplifier, a customized low-noise amplifier and a chopper-stabilized amplifier with a track-and-hold signal demodulator. Finally, a noise equivalent acceleration below 1 mg/√Hz has been reached, which is interesting for applications in consumer electronics.

Dates et versions

lirmm-00282864 , version 1 (28-05-2008)

Identifiants

Citer

Olivier Leman, Frédérick Mailly, Laurent Latorre, Pascal Nouet. HDL Modeling of Convective Accelerometers for System Design and Optimization. Sensors and Actuators A: Physical , 2008, 142, Issue 1, pp.178-184. ⟨10.1016/j.sna.2007.07.034⟩. ⟨lirmm-00282864⟩
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