A Physics-Based Compact Model for ESD Protection Diodes under Very Fast Transients

Abstract : In this paper, a complete analysis of the physical phenomena occurring in ESD protection diodes during very fast transients is investigated. Thanks to TCAD simulations and transient characterization, it is highlighted that the mobility degradation effect must be taken into account in addition to the conductivity modulation effect for modeling diode behavior during triggering. Finally, a new physics-based compact model of ESD protection diodes is proposed, demonstrated and validated under very fast transient events in the CDM time domain.