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Analytical and Finite-Element Modeling of a Localized-Mass Sensor

Abstract : Analytical and finite-element models of a localized-mass sensor fabricated with thin-film bulk acoustic wave resonator (FBAR) are reported. A Masonpsilas model-based analytical approach to understand the non-linear behavior of the sensor is introduced. On the other hand, careful finite-element analysis (FEA) of the sensor is carried out for different mass-loading configurations. Based on both modeling and experimental results, the non-linear behavior of the localized-mass sensorpsilas responsivity is confirmed.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00363479
Contributor : Martine Peridier <>
Submitted on : Monday, February 23, 2009 - 2:27:04 PM
Last modification on : Monday, March 29, 2021 - 11:50:03 AM

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Humberto Campanella, Jaume Esteve, Pascal Nouet, Emile Martincic, Arantxa Uranga, et al.. Analytical and Finite-Element Modeling of a Localized-Mass Sensor. Sensors, Oct 2008, Lecce, Italy. pp.367-370, ⟨10.1109/ICSENS.2008.4716457⟩. ⟨lirmm-00363479⟩

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