A MEMS Multi-Sensor System for Attitude Determination

Abstract : This paper presents an original multi-sensor system for 3D orientation determination based on only 4 MEMS sensors. MEMS sensors are manufactured on a cheap standard technology from NXP Semiconductors using TMAH front side wet etching with no additional masking step. This very low cost manufacturing process makes the system suitable for various consumer applications. Electronic architecture for signal conditioning is detailed covering issues regarding the design of piezoresistor based systems (offsets, flicker noise...). Finally, the complete system has been prototyped proving the interest and the feasibility of such devices.
Type de document :
Communication dans un congrès
DTIP'09: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, Apr 2009, pp.261-264, 2009
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00373753
Contributeur : Frédérick Mailly <>
Soumis le : mardi 7 avril 2009 - 11:29:25
Dernière modification le : jeudi 11 janvier 2018 - 06:27:19

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  • HAL Id : lirmm-00373753, version 1

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Boris Alandry, Norbert Dumas, Laurent Latorre, Frédérick Mailly, Pascal Nouet. A MEMS Multi-Sensor System for Attitude Determination. DTIP'09: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, Apr 2009, pp.261-264, 2009. 〈lirmm-00373753〉

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