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A Study of Package Effects on the Behavior of MEMS Convective Accelerometers

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00489026
Contributor : Martine Peridier <>
Submitted on : Thursday, June 3, 2010 - 4:17:21 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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  • HAL Id : lirmm-00489026, version 1

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Ahmed Rekik, Florence Azaïs, Norbert Dumas, Mohamed Masmoudi, Frédérick Mailly, et al.. A Study of Package Effects on the Behavior of MEMS Convective Accelerometers. DTIP'10: Design, Test, Integration and Packaging of MEMS/MOEMS, Seville, Spain. pp.6-9. ⟨lirmm-00489026⟩

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