A Study of Package Effects on the Behavior of MEMS Convective Accelerometers - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Papers Year : 2010

A Study of Package Effects on the Behavior of MEMS Convective Accelerometers

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Micro and nanotechnologies/Microelectronics

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00489026

Submitted on : Thursday, June 3, 2010-4:17:21 PM

Last modification on : Friday, March 24, 2023-2:52:53 PM

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lirmm-00489026 , version 1 (03-06-2010)

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  • HAL Id : lirmm-00489026 , version 1

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Ahmed Rekik, Florence Azaïs, Norbert Dumas, Mohamed Masmoudi, Frédérick Mailly, et al.. A Study of Package Effects on the Behavior of MEMS Convective Accelerometers. DTIP'10: Design, Test, Integration and Packaging of MEMS/MOEMS, Seville, Spain. pp.6-9. ⟨lirmm-00489026⟩

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