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Smart Drivers for Online Diagnosis of Electrostatic MEMS Actuators

Norbert Dumas 1 Laurent Latorre 1 Frédérick Mailly 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : This paper introduces the design of High-Voltage CMOS drivers for Electrostatic MEMS switches. In order to perform online diagnosis, the proposed architecture implements a dedicated circuitry that can detect the pull-in event. This way, stuck or broken switches are identified during operation. The pull-in event corresponds to a rapid change in the actuation capacitance thus producing a current peak during actuation. The idea is therefore to measure the charging current, using a differential method that cancels the effects of any parallel parasitic capacitance.
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Submitted on : Wednesday, June 23, 2010 - 2:27:28 PM
Last modification on : Friday, October 22, 2021 - 3:07:39 PM
Long-term archiving on: : Friday, September 24, 2010 - 5:28:33 PM


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  • HAL Id : lirmm-00494515, version 1



Norbert Dumas, Laurent Latorre, Frédérick Mailly, Pascal Nouet. Smart Drivers for Online Diagnosis of Electrostatic MEMS Actuators. IMS3TW'10: 16th IEEE International Mixed-Signals, Sensors and Systems Test Workshop, La Grande Motte, Montpellier, France. pp.N/A. ⟨lirmm-00494515⟩



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