Smart Drivers for Online Diagnosis of Electrostatic MEMS Actuators - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2010

Smart Drivers for Online Diagnosis of Electrostatic MEMS Actuators

Abstract

This paper introduces the design of High-Voltage CMOS drivers for Electrostatic MEMS switches. In order to perform online diagnosis, the proposed architecture implements a dedicated circuitry that can detect the pull-in event. This way, stuck or broken switches are identified during operation. The pull-in event corresponds to a rapid change in the actuation capacitance thus producing a current peak during actuation. The idea is therefore to measure the charging current, using a differential method that cancels the effects of any parallel parasitic capacitance.
Fichier principal
Vignette du fichier
ims3tw10-10.pdf (709.95 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

lirmm-00494515 , version 1 (23-06-2010)

Identifiers

  • HAL Id : lirmm-00494515 , version 1

Cite

Norbert Dumas, Laurent Latorre, Frédérick Mailly, Pascal Nouet. Smart Drivers for Online Diagnosis of Electrostatic MEMS Actuators. IMS3TW'10: 16th IEEE International Mixed-Signals, Sensors and Systems Test Workshop, La Grande Motte, Montpellier, France. pp.N/A. ⟨lirmm-00494515⟩
77 View
344 Download

Share

Gmail Facebook X LinkedIn More