Skip to Main content Skip to Navigation
Journal articles

A BE-SOI MEMS for Inertial Measurement in Geophysical Applications

Abstract : Abstract--In this paper, an inertial transducer developed in bulk and etch silicon-on-insulator microelectromechanical-system technology is presented. The device is suitable for low-frequency observation and could represent an interesting solution to implement low-cost monitoring systems for applications requiring a large number of monitoring sites and disposable devices. In particular, the sensor design and the technology adopted are presented here along with models describing the device operation. In addition, an experimental sensor prototype is proposed, and experimental results confirming the suitability of the proposed architecture and its consistence with the predicted behavior are discussed.
Complete list of metadatas

Cited literature [20 references]  Display  Hide  Download

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00580557
Contributor : Carlo Trigona <>
Submitted on : Monday, March 28, 2011 - 2:43:44 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM
Document(s) archivé(s) le : Wednesday, June 29, 2011 - 2:56:28 AM

File

A_BE-SOI_MEMS.pdf
Files produced by the author(s)

Identifiers

  • HAL Id : lirmm-00580557, version 1

Collections

Citation

Carlo Trigona, Salvatore Baglio, Bruno Andò, Gaetano l'Episcopo, Vincenzo Marletta, et al.. A BE-SOI MEMS for Inertial Measurement in Geophysical Applications. IEEE Transactions on Instrumentation and Measurement, Institute of Electrical and Electronics Engineers, 2011, 60 (5), pp.1901-1908. ⟨lirmm-00580557⟩

Share

Metrics

Record views

297

Files downloads

529