A BE-SOI MEMS for Inertial Measurement in Geophysical Applications - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Journal Articles IEEE Transactions on Instrumentation and Measurement Year : 2011

A BE-SOI MEMS for Inertial Measurement in Geophysical Applications

Abstract

Abstract--In this paper, an inertial transducer developed in bulk and etch silicon-on-insulator microelectromechanical-system technology is presented. The device is suitable for low-frequency observation and could represent an interesting solution to implement low-cost monitoring systems for applications requiring a large number of monitoring sites and disposable devices. In particular, the sensor design and the technology adopted are presented here along with models describing the device operation. In addition, an experimental sensor prototype is proposed, and experimental results confirming the suitability of the proposed architecture and its consistence with the predicted behavior are discussed.
Fichier principal
Vignette du fichier
A_BE-SOI_MEMS.pdf (1.3 Mo) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

lirmm-00580557 , version 1 (28-03-2011)

Identifiers

Cite

Carlo Trigona, Salvatore Baglio, Bruno Andò, Gaetano L'Episcopo, Vincenzo Marletta, et al.. A BE-SOI MEMS for Inertial Measurement in Geophysical Applications. IEEE Transactions on Instrumentation and Measurement, 2011, 60 (5), pp.1901-1908. ⟨10.1109/TIM.2011.2108077⟩. ⟨lirmm-00580557⟩
145 View
468 Download

Altmetric

Share

Gmail Facebook X LinkedIn More