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A BE-SOI MEMS for Inertial Measurement in Geophysical Applications

Abstract : Abstract--In this paper, an inertial transducer developed in bulk and etch silicon-on-insulator microelectromechanical-system technology is presented. The device is suitable for low-frequency observation and could represent an interesting solution to implement low-cost monitoring systems for applications requiring a large number of monitoring sites and disposable devices. In particular, the sensor design and the technology adopted are presented here along with models describing the device operation. In addition, an experimental sensor prototype is proposed, and experimental results confirming the suitability of the proposed architecture and its consistence with the predicted behavior are discussed.
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Submitted on : Monday, March 28, 2011 - 2:43:44 PM
Last modification on : Friday, October 22, 2021 - 3:07:39 PM
Long-term archiving on: : Wednesday, June 29, 2011 - 2:56:28 AM


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  • HAL Id : lirmm-00580557, version 1



Carlo Trigona, Salvatore Baglio, Bruno Andò, Gaetano l'Episcopo, Vincenzo Marletta, et al.. A BE-SOI MEMS for Inertial Measurement in Geophysical Applications. IEEE Transactions on Instrumentation and Measurement, Institute of Electrical and Electronics Engineers, 2011, 60 (5), pp.1901-1908. ⟨lirmm-00580557⟩



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