Carlo Trigona, Norbert Dumas, Laurent Latorre, Pascal Nouet. A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches.
DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Aix-en-Provence, France. pp.315-319.
⟨lirmm-00632583⟩