Conference Papers
Year : 2011
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00632583
Submitted on : Friday, October 14, 2011-4:38:24 PM
Last modification on : Friday, March 24, 2023-2:52:54 PM
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- HAL Id : lirmm-00632583 , version 1
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Carlo Trigona, Norbert Dumas, Laurent Latorre, Pascal Nouet. A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches. DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Aix-en-Provence, France. pp.315-319. ⟨lirmm-00632583⟩
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