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Conference papers

A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches

Carlo Trigona 1 Norbert Dumas 1 Laurent Latorre 1 Pascal Nouet 1 
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
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Conference papers
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00632583
Contributor : Martine Peridier Connect in order to contact the contributor
Submitted on : Friday, October 14, 2011 - 4:38:24 PM
Last modification on : Friday, August 5, 2022 - 10:47:59 AM

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  • HAL Id : lirmm-00632583, version 1

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

Citation

Carlo Trigona, Norbert Dumas, Laurent Latorre, Pascal Nouet. A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches. DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Aix-en-Provence, France. pp.315-319. ⟨lirmm-00632583⟩

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