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Conference Papers Year : 2011

A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches

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lirmm-00632583 , version 1 (14-10-2011)

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  • HAL Id : lirmm-00632583 , version 1

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Carlo Trigona, Norbert Dumas, Laurent Latorre, Pascal Nouet. A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches. DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Aix-en-Provence, France. pp.315-319. ⟨lirmm-00632583⟩
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