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A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches

Carlo Trigona 1 Norbert Dumas 1 Laurent Latorre 1 Pascal Nouet 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00632583
Contributor : Martine Peridier <>
Submitted on : Friday, October 14, 2011 - 4:38:24 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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  • HAL Id : lirmm-00632583, version 1

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Carlo Trigona, Norbert Dumas, Laurent Latorre, Pascal Nouet. A Novel Integrated Solution for the Control and Diagnosis of Electrostatic MEMS Switches. DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Aix-en-Provence, France. pp.315-319. ⟨lirmm-00632583⟩

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