Investigation on the Effect of Geometrical Dimensions on the Conductive Behaviour of a MEMS Convective Accelerometer - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2011

Investigation on the Effect of Geometrical Dimensions on the Conductive Behaviour of a MEMS Convective Accelerometer

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lirmm-00632610 , version 1 (14-10-2011)

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  • HAL Id : lirmm-00632610 , version 1

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Ahmed Rekik, Brahim Mezghani, Florence Azaïs, Norbert Dumas, Mohamed Masmoudi, et al.. Investigation on the Effect of Geometrical Dimensions on the Conductive Behaviour of a MEMS Convective Accelerometer. DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Aix-en-Provence, France. pp.14-17. ⟨lirmm-00632610⟩
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