Investigation on the Effect of Geometrical Dimensions on the Conductive Behaviour of a MEMS Convective Accelerometer

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00632610
Contributor : Martine Peridier <>
Submitted on : Friday, October 14, 2011 - 5:14:30 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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  • HAL Id : lirmm-00632610, version 1

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Ahmed Rekik, Brahim Mezghani, Florence Azaïs, Norbert Dumas, Mohamed Masmoudi, et al.. Investigation on the Effect of Geometrical Dimensions on the Conductive Behaviour of a MEMS Convective Accelerometer. DTIP'11: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Aix-en-Provence, France. pp.14-17. ⟨lirmm-00632610⟩

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