Exact wafer matching process wafer to wafer inegration - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Poster Year : 2012

Exact wafer matching process wafer to wafer inegration

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Operations Research [math.OC]

Rodolphe Giroudeau  : Connect in order to contact the contributor

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00805059

Submitted on : Tuesday, March 26, 2013-9:51:48 PM

Last modification on : Friday, March 24, 2023-2:52:56 PM

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lirmm-00805059 , version 1 (26-03-2013)

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  • HAL Id : lirmm-00805059 , version 1

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Rodolphe Giroudeau, Giorgio Di Natale, Marie-Lise Flottes, Florent Hernandez. Exact wafer matching process wafer to wafer inegration. 3D Integration Applications, 2012, Grenoble, France. Workshop on 3D Integration Applications, Technology, Architecture, Design, Automation, and Test, 2012. ⟨lirmm-00805059⟩

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