Abstract : In this paper we present a BIST method for TSV pre-bond testing. A dedicated test circuitry per TSV is desi gned and simulated w.r.t a variety of defects and PVT variations. Based on discharge delay evaluation, the BIST scheme supports concurrent testing, requires small-area implementation and it is robust against PVT variations.
Giorgio Di Natale, Marie-Lise Flottes, Bruno Rouzeyre, Hakim Zimouche. Built-In Self-Test for Manufacturing TSV Defects before bonding. VTS: VLSI Test Symposium, Apr 2014, Napa, CA, United States. ⟨10.1109/VTS.2014.6818771⟩. ⟨lirmm-00989682⟩