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MEMS based Inertial Measurement Units

Gaurav Chatterjee 1 Laurent Latorre 1 Frédérick Mailly 1 Pascal Nouet 1 Nacim Hachelef 2 Coumar Oudéa 2
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
2 Airbus Defence and Space [Toulouse]
Abstract : Inertial Measurement Units (IMU) are essentially a combination of acceleration and rotation rate sensors, generating acceleration and attitude information. For strategic applications, like outer space launchers, traditional macro-scale technologies are currently employed, owing to their very high accuracies and low drift. But they are very bulky and power consuming. Recent advancements in MEMS technology have enabled us to explore micro-electro-mechanical-systems (MEMS) based IMUs for demanding applications, which is the subject of this paper.
Keywords : IMU Accelerometers MEMS
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Conference papers
Complete list of metadatas
https://hal-lirmm.ccsd.cnrs.fr/lirmm-01235526
Contributor : Frédérick Mailly <>
Submitted on : Monday, November 30, 2015 - 11:41:43 AM
Last modification on : Wednesday, July 24, 2019 - 4:51:29 PM

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER | SMARTIES

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Gaurav Chatterjee, Laurent Latorre, Frédérick Mailly, Pascal Nouet, Nacim Hachelef, et al.. MEMS based Inertial Measurement Units. DTIP: Design, Test, Integration and Packaging, Apr 2015, Montpellier, France. ⟨10.1109/DTIP.2015.7160966⟩. ⟨lirmm-01235526⟩

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