A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2018

A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects

Jie Liang
  • Function : Author
  • PersonId : 971767
G. Goncalves
B. Chen
  • Function : Author
K. Teo
  • Function : Author
Reetu Raj Pandey
  • Function : Author
  • PersonId : 1032244
Aida Todri-Sanial

Abstract

We investigate, by combining physical and electrical measurements together with an atomistic-to-circuit modeling approach, the conductance of doped carbon nanotubes (CNTs) and their eligibility as possible candidate for next generation back-end-of-line (BEOL) interconnects. Ab-initio simulations predict a doping-related shift of the Fermi level, which reduces shell chirality variability and improves electrical conductance up to 90% by converting semiconducting shells to metallic. Circuit-level simulations predict up to 88% signal delay improvement with doped vs. pristine CNT. Electrical measurements of Pt-salt doped CNTs provide up to 50% of resistance reduction which is a milestone result for future CNT interconnect technology.

Dates and versions

lirmm-01795777 , version 1 (18-05-2018)

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Jie Liang, Raphael Ramos, Jean Dijon, H. Okuno, D. Kalita, et al.. A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects. IEDM: International Electron Devices Meeting, Dec 2017, San Francisco, United States. ⟨10.1109/IEDM.2017.8268502⟩. ⟨lirmm-01795777⟩
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