A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects

Abstract : We investigate, by combining physical and electrical measurements together with an atomistic-to-circuit modeling approach, the conductance of doped carbon nanotubes (CNTs) and their eligibility as possible candidate for next generation back-end-of-line (BEOL) interconnects. Ab-initio simulations predict a doping-related shift of the Fermi level, which reduces shell chirality variability and improves electrical conductance up to 90% by converting semiconducting shells to metallic. Circuit-level simulations predict up to 88% signal delay improvement with doped vs. pristine CNT. Electrical measurements of Pt-salt doped CNTs provide up to 50% of resistance reduction which is a milestone result for future CNT interconnect technology.
Liste complète des métadonnées

https://hal-lirmm.ccsd.cnrs.fr/lirmm-01795777
Contributor : Philippe Maurine <>
Submitted on : Friday, May 18, 2018 - 4:58:07 PM
Last modification on : Thursday, March 7, 2019 - 5:00:03 PM

Links full text

Identifiers

Citation

Jie Liang, Raphael Ramos, Jean Dijon, H. Okuno, D. Kalita, et al.. A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects. IEDM: International Electron Devices Meeting, Dec 2017, San Francisco, United States. ⟨10.1109/IEDM.2017.8268502⟩. ⟨lirmm-01795777⟩

Share

Metrics

Record views

114