A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects

Abstract : We investigate, by combining physical and electrical measurements together with an atomistic-to-circuit modeling approach, the conductance of doped carbon nanotubes (CNTs) and their eligibility as possible candidate for next generation back-end-of-line (BEOL) interconnects. Ab-initio simulations predict a doping-related shift of the Fermi level, which reduces shell chirality variability and improves electrical conductance up to 90% by converting semiconducting shells to metallic. Circuit-level simulations predict up to 88% signal delay improvement with doped vs. pristine CNT. Electrical measurements of Pt-salt doped CNTs provide up to 50% of resistance reduction which is a milestone result for future CNT interconnect technology.
Type de document :
Communication dans un congrès
IEDM: International Electron Devices Meeting, Dec 2017, San Francisco, United States. IEEE, IEEE International Electron Devices Meeting, 2018, 〈10.1109/IEDM.2017.8268502〉
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-01795777
Contributeur : Philippe Maurine <>
Soumis le : vendredi 18 mai 2018 - 16:58:07
Dernière modification le : lundi 11 février 2019 - 16:50:29

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Jie Liang, Raphael Ramos, Jean Dijon, H. Okuno, D. Kalita, et al.. A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects. IEDM: International Electron Devices Meeting, Dec 2017, San Francisco, United States. IEEE, IEEE International Electron Devices Meeting, 2018, 〈10.1109/IEDM.2017.8268502〉. 〈lirmm-01795777〉

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