Post-fabrication soft trimming of resistive sensors - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2018

Post-fabrication soft trimming of resistive sensors

Abstract

A compact and efficient architecture is introduced as an alternative to laser-trimmed precision thin-film resistor. The purpose is to compensate for process-induced offset in Wheatstone bridges and to avoid the then-obtained degradation in terms of full-scale, non-linearity, power supply noise rejection... Expected advantages are a reduced cost due to the fully-electrical implementation and, depending on the programming technology, a possible re-calibration of high-end sensors.
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Dates and versions

lirmm-01827725 , version 1 (02-07-2018)

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Ibrahim Shankhour, Jad Mohdad, Frédérick Mailly, Pascal Nouet. Post-fabrication soft trimming of resistive sensors. DTIP 2018 - 20th Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS, May 2018, Roma, Italy. ⟨10.1109/DTIP.2018.8394221⟩. ⟨lirmm-01827725⟩
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