Post-fabrication soft trimming of resistive sensors

Abstract : A compact and efficient architecture is introduced as an alternative to laser-trimmed precision thin-film resistor. The purpose is to compensate for process-induced offset in Wheatstone bridges and to avoid the then-obtained degradation in terms of full-scale, non-linearity, power supply noise rejection... Expected advantages are a reduced cost due to the fully-electrical implementation and, depending on the programming technology, a possible re-calibration of high-end sensors.
Type de document :
Communication dans un congrès
DTIP: Design, Test, Integration and Packaging, May 2018, Roma, Italy. IEEE, 20th Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS, 2018, 〈http://dtip-mems.org〉. 〈10.1109/DTIP.2018.8394221〉
Liste complète des métadonnées

https://hal-lirmm.ccsd.cnrs.fr/lirmm-01827725
Contributeur : Pascal Nouet <>
Soumis le : lundi 2 juillet 2018 - 15:57:11
Dernière modification le : mardi 23 octobre 2018 - 17:32:02

Identifiants

Citation

Ibrahim Shankhour, Jad Mohdad, Frédérick Mailly, Pascal Nouet. Post-fabrication soft trimming of resistive sensors. DTIP: Design, Test, Integration and Packaging, May 2018, Roma, Italy. IEEE, 20th Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS, 2018, 〈http://dtip-mems.org〉. 〈10.1109/DTIP.2018.8394221〉. 〈lirmm-01827725〉

Partager

Métriques

Consultations de la notice

74