Mechanical Stop Mechanism For Overcoming MEMS Fabrication Tolerances

Abstract : A mechanical stop mechanism is developed in order to compensate MEMS fabrication tolerances in discrete positioning. The mechanical stop mechanism is designed to be implemented on SOI wafers using a common DRIE etching process. The various fabrication tolerances obtained due to the etching process are presented and discussed in the paper. The principle and design of the mechanism are then presented. Finally, experiments on microfabricated positioning prototypes show accurate steps unaffected by the fabrication tolerances.
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Hussein Hussein, Gilles Bourbon, Patrice Le Moal, Yassine Haddab, Philippe Lutz. Mechanical Stop Mechanism For Overcoming MEMS Fabrication Tolerances. Journal of Micromechanics and Microengineering, IOP Publishing, 2017, 27 (1), pp.017001. ⟨10.1088/0960-1317/27/1/017001⟩. ⟨lirmm-02006512⟩

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