Design and fabrication of novel discrete actuators for microrobotic tasks

Hussein Hussein 1 Ismaïl Bouhadda 2 Abdenbi Mohand-Ousaid 1 Gilles Bourbon 1 Patrice Le Moal 1 Yassine Haddab 3 Philippe Lutz 1
1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 IETR - Institut d'Electronique et de Télécommunications de Rennes
3 DEXTER - Conception et commande de robots pour la manipulation
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : This paper presents a compliant monolithic multistable actuator which is able to switch its moving part between several stable positions linearly in one dimensional direction. The number of stable positions can be increased by extending the range of displacement of the moving part. The transition in each step of displacement is made to the nearest stable position in the direction of motion. Upward and downward steps are made by a specific sequence of moving, using a bistable module, opening and closing two internal clamps which are actuated by U-shaped electrothermal actuator using three subsystems. The principle and the design of each subsystem in the discrete acruator, fabrication process and experimental results are presented. The fabricated prototypes of the discrete actuator showed a proper functioning. The mean achieved displacement is 120.67±0.08 µm over 12 upward steps with a mean step of 10.06 µm, which is very close to the designed performance.
Keywords : Bulk micromachining Multistable module Microfabrication Preshaped curved beam U-shaped electrothermal actuator
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LIRMM | UNIV-BM | UNIV-FCOMTE | UNIV-BM-THESE | IETR | DEXTER | UR1-UFR-ISTIC | FEMTO-ST | MIPS | UNIV-MONTPELLIER | UNIV-NANTES | INSA-GROUPE | TDS-MACS | UNIV-RENNES1 | UNIV-RENNES

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Hussein Hussein, Ismaïl Bouhadda, Abdenbi Mohand-Ousaid, Gilles Bourbon, Patrice Le Moal, et al.. Design and fabrication of novel discrete actuators for microrobotic tasks. Sensors and Actuators A: Physical , Elsevier, 2018, 271, pp.373-382. ⟨10.1016/j.sna.2017.12.065⟩. ⟨lirmm-02006920⟩

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