Fully Electrical Post-Fabrication Trimming of Resistive Sensors - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Journal Articles Sensors Year : 2022

Fully Electrical Post-Fabrication Trimming of Resistive Sensors

Ibrahim Shankhour
  • Function : Author
  • PersonId : 1033950
Jad Mohdad
  • Function : Author
  • PersonId : 1028255
Pascal Nouet

Abstract

A compact and efficient IC architecture is presented as an alternative to laser-trimmed precision thin-film resistors or look-up tables. The objective is to keep the device, such as a four-terminal Wheatstone bridge, but to compensate for post-manufacturing offset and to avoid the so-induced degradation of performances in terms of full-scale, non-linearity, power supply noise rejection and scale factor. Expected advantages are a reduced cost due to the electrical-only implementation and a possible on-field calibration of high-end sensors. Application of the proposed solution is illustrated on an example to demonstrate improvement factors on offset and sensitivity accuracy of 32 and 10, respectively. Additionally, the power supply rejection ratio is improved by 30 dB. The experimental results finally demonstrate both efficiency and versatility of the proposed solution thanks to a first silicon prototype, fabricated in a 0.35 μm Technology from AMS, connected to an off-the-shelf pressure sensor.
Fichier principal
Vignette du fichier
sensors-22-00767-v2.pdf (5.98 Mo) Télécharger le fichier

Dates and versions

lirmm-03542034 , version 1 (25-01-2022)

Licence

Identifiers

Cite

Ibrahim Shankhour, Jad Mohdad, Frédérick Mailly, Pascal Nouet. Fully Electrical Post-Fabrication Trimming of Resistive Sensors. Sensors, 2022, 22 (3), pp.767-784. ⟨10.3390/s22030767⟩. ⟨lirmm-03542034⟩
20 View
39 Download

Altmetric

Share

Gmail Mastodon Facebook X LinkedIn More