B-open Defect: A Novel Defect Model in FinFET Technology - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Journal Articles ACM Journal on Emerging Technologies in Computing Systems Year : 2022

B-open Defect: A Novel Defect Model in FinFET Technology

Abstract

This article proposes an electrical analysis of a new defect mechanism, to be named as b-open defect, which may occur in nanometer technologies due to the use of the Self-Aligned Double Patterning (SADP) technique. In metal lines making use of the SADP technique, a single dust particle may cause the simultaneous occurrence of a bridge defect and an open defect. When the two defects impact the same gates, the electrical effects of the bridge and the open combine and exhibit a new specific electrical behavior; we call this new defect behavior a b-open. As a consequence, existing test generation methodologies may miss defect detection. The electrical behavior of the b-open defect is first analyzed graphically and then validated through extensive SPICE simulations. The test pattern conditions to detect the b-open defect are finally determined, and it is shown that the b-open defect requires specific test generation.
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Dates and versions

lirmm-04687231 , version 1 (04-09-2024)

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Cite

Freddy Forero, Victor Champac, Michel Renovell. B-open Defect: A Novel Defect Model in FinFET Technology. ACM Journal on Emerging Technologies in Computing Systems, 2022, 19 (1), pp.1-19. ⟨10.1145/3564244⟩. ⟨lirmm-04687231⟩
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