Electrically-Induced Thermal Stimuli for MEMS Testing - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2004

Electrically-Induced Thermal Stimuli for MEMS Testing

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lirmm-00109142 , version 1 (24-10-2006)

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  • HAL Id : lirmm-00109142 , version 1

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Pascal Nouet. Electrically-Induced Thermal Stimuli for MEMS Testing. 1st DfMM Summer School, 2004. ⟨lirmm-00109142⟩
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