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Testing Reasonant Micro-Electro-Mechanical Sensors Using the Oscillation-Based Test Methodology

Vincent Beroulle 1 Yves Bertrand 2 Laurent Latorre 2 Pascal Nouet 2
1 LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
2 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
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Conference papers
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00269323
Contributor : Christine Carvalho de Matos <>
Submitted on : Wednesday, April 2, 2008 - 4:46:00 PM
Last modification on : Wednesday, January 1, 2020 - 6:46:01 PM

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  • HAL Id : lirmm-00269323, version 1

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CNRS | SYSMIC | LIRMM | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER

Citation

Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet. Testing Reasonant Micro-Electro-Mechanical Sensors Using the Oscillation-Based Test Methodology. LATW'02: 3rd IEEE Latin American Test Workshop, Montevideo (Uruguay), France. pp. 99-104. ⟨lirmm-00269323⟩

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