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Conference Papers Year : 2002

Testing Reasonant Micro-Electro-Mechanical Sensors Using the Oscillation-Based Test Methodology

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Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

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Submitted on : Wednesday, April 2, 2008-4:46:00 PM

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lirmm-00269323 , version 1 (02-04-2008)

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  • HAL Id : lirmm-00269323 , version 1

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Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet. Testing Reasonant Micro-Electro-Mechanical Sensors Using the Oscillation-Based Test Methodology. LATW 2002 - 3rd IEEE Latin American Test Workshop, Feb 2002, Montevideo, Uruguay. pp.99-104. ⟨lirmm-00269323⟩

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