Skip to Main content Skip to Navigation
Conference papers

Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging

Complete list of metadata

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00436120
Contributor : Martine Peridier <>
Submitted on : Thursday, November 26, 2009 - 10:39:50 AM
Last modification on : Wednesday, September 16, 2020 - 4:56:12 PM

Identifiers

  • HAL Id : lirmm-00436120, version 1

Citation

Elie Lefeuvre, Emile Martincic, Edmond Woytasik, Xavier Leroux, S. Edmond, et al.. Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging. Proceedings of the Eurosensors XXIII Conference, France. pp.782-785. ⟨lirmm-00436120⟩

Share

Metrics

Record views

236