Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2009
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lirmm-00436120 , version 1 (26-11-2009)

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  • HAL Id : lirmm-00436120 , version 1

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Elie Lefeuvre, Emile Martincic, Edmond Woytasik, Xavier Leroux, S. Edmond, et al.. Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging. Proceedings of the Eurosensors XXIII Conference, France. pp.782-785. ⟨lirmm-00436120⟩
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