Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2009

Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging

Domains

Micro and nanotechnologies/Microelectronics

Martine Peridier  : Connect in order to contact the contributor

https://hal-lirmm.ccsd.cnrs.fr/lirmm-00436120

Submitted on : Thursday, November 26, 2009-10:39:50 AM

Last modification on : Monday, June 5, 2023-4:52:11 PM

No file

Dates and versions

lirmm-00436120 , version 1 (26-11-2009)

Identifiers

  • HAL Id : lirmm-00436120 , version 1

Cite

Elie Lefeuvre, Emile Martincic, Edmond Woytasik, Xavier Leroux, S. Edmond, et al.. Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging. Proceedings of the Eurosensors XXIII Conference, France. pp.782-785. ⟨lirmm-00436120⟩

Export

BibTeX TEI Dublin Core DC Terms EndNote Datacite

Collections

CNRS IMS-BORDEAUX SYSMIC IMS-BORDEAUX-FUSION LIRMM UNIV-PARIS-SACLAY LIRMM_MIC MIC MIPS UNIV-MONTPELLIER
126 View
0 Download

Share

Gmail Facebook Twitter LinkedIn More