Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00436120
Contributor : Martine Peridier <>
Submitted on : Thursday, November 26, 2009 - 10:39:50 AM
Last modification on : Thursday, July 5, 2018 - 11:12:35 PM

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  • HAL Id : lirmm-00436120, version 1

Citation

Elie Lefeuvre, Emile Martincic, Edmond Woytasik, Xavier Leroux, S. Edmond, et al.. Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging. Proceedings of the Eurosensors XXIII Conference, France. pp.782-785. ⟨lirmm-00436120⟩

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