Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier
Conference Papers Year : 2009

Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging

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Micro and nanotechnologies/Microelectronics

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00436120

Submitted on : Thursday, November 26, 2009-10:39:50 AM

Last modification on : Wednesday, March 13, 2024-4:52:27 PM

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lirmm-00436120 , version 1 (26-11-2009)

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  • HAL Id : lirmm-00436120 , version 1

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Elie Lefeuvre, Emile Martincic, Edmond Woytasik, Xavier Leroux, S. Edmond, et al.. Silicon on Insulator Temperature and Pressure Sensor for MEMS Smart Packaging. Proceedings of the Eurosensors XXIII Conference, France. pp.782-785. ⟨lirmm-00436120⟩

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CNRS IMS-BORDEAUX SYSMIC IMS-BORDEAUX-FUSION LIRMM UNIV-PARIS-SACLAY LIRMM_MIC MIC MIPS UNIV-MONTPELLIER
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