Modeling the Influence of Etching Defects on the Sensitivity of MEMS Convective Accelerometers

Abstract : In this paper, a behavioral model that includes the influence of etching defects on the sensitivity of MEMS convective accelerometers is presented. Starting from an existing behavioral model, new physically-based expressions have been derived to introduce etching defects in the simulation of thermal conduction in the sensor. In addition, a semi-empirical model has been introduced for thermal convection. Finally, a very good agreement is obtained between the behavioral model and FEM simulations.
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Communication dans un congrès
IMS3TW'10: 16th IEEE International Mixed-Signals, Sensors and Systems Test Workshop, La Grande Motte, Montpellier, France. IEEE, pp.N/A, 2010
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Ahmed Rekik, Florence Azaïs, Norbert Dumas, Frédérick Mailly, Pascal Nouet. Modeling the Influence of Etching Defects on the Sensitivity of MEMS Convective Accelerometers. IMS3TW'10: 16th IEEE International Mixed-Signals, Sensors and Systems Test Workshop, La Grande Motte, Montpellier, France. IEEE, pp.N/A, 2010. 〈lirmm-00494555〉

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