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Modeling the Influence of Etching Defects on the Sensitivity of MEMS Convective Accelerometers

Abstract : In this paper, a behavioral model that includes the influence of etching defects on the sensitivity of MEMS convective accelerometers is presented. Starting from an existing behavioral model, new physically-based expressions have been derived to introduce etching defects in the simulation of thermal conduction in the sensor. In addition, a semi-empirical model has been introduced for thermal convection. Finally, a very good agreement is obtained between the behavioral model and FEM simulations.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00494555
Contributor : Martine Peridier <>
Submitted on : Wednesday, June 23, 2010 - 3:25:43 PM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM
Long-term archiving on: : Thursday, December 1, 2016 - 4:13:59 PM

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Ahmed Rekik, Florence Azaïs, Norbert Dumas, Frédérick Mailly, Pascal Nouet. Modeling the Influence of Etching Defects on the Sensitivity of MEMS Convective Accelerometers. IMS3TW'10: 16th IEEE International Mixed-Signals, Sensors and Systems Test Workshop, La Grande Motte, Montpellier, France. pp.N/A. ⟨lirmm-00494555⟩

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