Modeling the Influence of Etching Defects on the Sensitivity of MEMS Convective Accelerometers - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Papers Year : 2010

Modeling the Influence of Etching Defects on the Sensitivity of MEMS Convective Accelerometers

Abstract

In this paper, a behavioral model that includes the influence of etching defects on the sensitivity of MEMS convective accelerometers is presented. Starting from an existing behavioral model, new physically-based expressions have been derived to introduce etching defects in the simulation of thermal conduction in the sensor. In addition, a semi-empirical model has been introduced for thermal convection. Finally, a very good agreement is obtained between the behavioral model and FEM simulations.
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Dates and versions

lirmm-00494555 , version 1 (23-06-2010)

Identifiers

  • HAL Id : lirmm-00494555 , version 1

Cite

Ahmed Rekik, Florence Azaïs, Norbert Dumas, Frédérick Mailly, Pascal Nouet. Modeling the Influence of Etching Defects on the Sensitivity of MEMS Convective Accelerometers. IMS3TW'10: 16th IEEE International Mixed-Signals, Sensors and Systems Test Workshop, La Grande Motte, Montpellier, France. pp.N/A. ⟨lirmm-00494555⟩
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