Numerical and Experimental Investigation on Contactless Resonant Sensors - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Journal Articles Sensors and Actuators A: Physical Year : 2010

Numerical and Experimental Investigation on Contactless Resonant Sensors

Abstract

This paper reports numerical and experimental investigation on a (bulk and etch silicon on insulator) BESOI MEMS device. The implemented contactless actuation principle, exploits Lorentz forces exerted on a conductive-non magnetic surface of the sensor. These forces derive from the interaction between the eddy-currents and the radial magnetic field, both generated by a sinusoidally driven external inductor. Both excitation and readout strategies are performed remotely via a magnetic strategy. The sensor proposed here has been first analytically and numerically studied by using CoventorWareTM 2008, then the device prototype has been fabricated and a preliminary experimental campaign has been performed to characterize the system in terms of variation of its resonance frequency against changes in the sensor mass.
Fichier principal
Vignette du fichier
Numerical_and_experimental_investigation.pdf (1.06 Mo) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

lirmm-00580564 , version 1 (28-03-2011)

Identifiers

Cite

Carlo Trigona, Salvatore Baglio, Bruno Andò, Nicolò Savalli, Marco Baù, et al.. Numerical and Experimental Investigation on Contactless Resonant Sensors. Sensors and Actuators A: Physical , 2010, 162 (2), pp.329-335. ⟨10.1016/j.sna.2010.04.009⟩. ⟨lirmm-00580564⟩
120 View
1016 Download

Altmetric

Share

Gmail Facebook X LinkedIn More