Exact wafer matching process wafer to wafer inegration - LIRMM - Laboratoire d’Informatique, de Robotique et de Microélectronique de Montpellier Access content directly
Conference Poster Year : 2012
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lirmm-00805059 , version 1 (26-03-2013)

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  • HAL Id : lirmm-00805059 , version 1

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Rodolphe Giroudeau, Giorgio Di Natale, Marie-Lise Flottes, Florent Hernandez. Exact wafer matching process wafer to wafer inegration. 3D Integration Applications, 2012, Grenoble, France. Workshop on 3D Integration Applications, Technology, Architecture, Design, Automation, and Test, 2012. ⟨lirmm-00805059⟩
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