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Mechanical Solution for Out-of-Plane Sensitivity Enhancement of CMOS MEMS Convective Accelerometers

Sonia Abdellatif 1, 2 Brahim Mezghani 1 Fares Tounisi 1 Frédérick Mailly 2 Pascal Nouet 2
1 ENIS - École Nationale d'Ingénieurs de Sfax | National School of Engineers of Sfax
2 SmartIES - Smart Integrated Electronic Systems
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : In this paper, a 3D finite element model for CMOS MEMS convective accelerometers is developed. The model validation is then performed using reported experimental values of sensor sensitivity. Among these values, the out-of-plane ones are the lowest. For improvement, a mechanical solution is proposed by assuring a vertical displacement of the heater plate when submitted to z-axis accelerations. This solution is presented and then analyzed using the developed model. Optimal location for the z-axis detectors is also explored. The study shows that a substantial increase of 300% in out-of-plane sensitivity can be attained if the proposed mechanical solution is applied.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-02354212
Contributor : Pascal Nouet <>
Submitted on : Tuesday, November 12, 2019 - 12:35:10 PM
Last modification on : Friday, February 5, 2021 - 3:02:13 PM

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LIRMM | CNRS | LIRMM_MIC | MIC | MIPS | UNIV-MONTPELLIER | SMARTIES

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Sonia Abdellatif, Brahim Mezghani, Fares Tounisi, Frédérick Mailly, Pascal Nouet. Mechanical Solution for Out-of-Plane Sensitivity Enhancement of CMOS MEMS Convective Accelerometers. ICECS: International Conference on Electronics, Circuits and Systems, Dec 2018, Bordeaux, France. pp.301-304, ⟨10.1109/ICECS.2018.8617928⟩. ⟨lirmm-02354212⟩

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