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Interconnect Capacitance Modelling in a VDSM CMOS Technology

David Bernard 1 Christian Landrault 2 Pascal Nouet 2
2 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : This paper introduces a set of analytical formulations for 3D modelling of inter- and intra-layer capacitance. Based on real silicon data, we have developed and validated efficient and accurate analytical models that are an helpful alternative to lookup tables or numerical simulations.
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00268482
Contributor : Christine Carvalho de Matos <>
Submitted on : Tuesday, April 1, 2008 - 9:27:29 AM
Last modification on : Thursday, May 24, 2018 - 3:59:24 PM

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David Bernard, Christian Landrault, Pascal Nouet. Interconnect Capacitance Modelling in a VDSM CMOS Technology. VLSI-SoC: Very Large Scale Integration of Systems-on-Chip, 2002, Montpellier, France. pp.133-144, ⟨10.1007/978-0-387-35597-9_12⟩. ⟨lirmm-00268482⟩

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