An Electrical Test Method for MEMS Convective Accelerometers: Development and Evaluation

In this paper, an alternative test method for MEMS convective accelerometers is presented. It is first demonstrated that device sensitivity can be determined without the use of physical test stimuli by simple electrical measurements. Using a previously developed behavioral model that allows efficient Monte-Carlo simulations, we have established a good correlation between electrical test parameters and device sensitivity. Proposed test method is finally evaluated for different strategies that privilege yield, fault coverage or test efficiency.

Mots clés

MEMS testing Convective accelerometer Alternative electrical test

Domaines

Micro et nanotechnologies/Microélectronique

Fichier principal

05763137.pdf (690.68 Ko)

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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00702754

Soumis le : dimanche 6 octobre 2019-12:23:48

Dernière modification le : vendredi 24 mars 2023-14:53:12

Dates et versions

lirmm-00702754 , version 1 (06-10-2019)

Identifiants

HAL Id : lirmm-00702754 , version 1
DOI : 10.1109/DATE.2011.5763137

Citer

Ahmed Rekik, Florence Azaïs, Norbert Dumas, Frédérick Mailly, Pascal Nouet. An Electrical Test Method for MEMS Convective Accelerometers: Development and Evaluation. DATE: Design, Automation and Test in Europe, Mar 2011, Grenoble, France. ⟨10.1109/DATE.2011.5763137⟩. ⟨lirmm-00702754⟩

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