An Electrical Test Method for MEMS Convective Accelerometers: Development and Evaluation

Abstract : In this paper, an alternative test method for MEMS convective accelerometers is presented. It is first demonstrated that device sensitivity can be determined without the use of physical test stimuli by simple electrical measurements. Using a previously developed behavioral model that allows efficient Monte-Carlo simulations, we have established a good correlation between electrical test parameters and device sensitivity. Proposed test method is finally evaluated for different strategies that privilege yield, fault coverage or test efficiency.
Type de document :
Communication dans un congrès
DATE'11: IEEE/ACM Design, Automation & Test in Europe Conference, France. pp.6, 2011
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https://hal-lirmm.ccsd.cnrs.fr/lirmm-00702754
Contributeur : Florence Azais <>
Soumis le : jeudi 31 mai 2012 - 11:41:13
Dernière modification le : jeudi 11 janvier 2018 - 06:27:18

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  • HAL Id : lirmm-00702754, version 1

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Ahmed Rekik, Florence Azaïs, Norbert Dumas, Frédérick Mailly, Pascal Nouet. An Electrical Test Method for MEMS Convective Accelerometers: Development and Evaluation. DATE'11: IEEE/ACM Design, Automation & Test in Europe Conference, France. pp.6, 2011. 〈lirmm-00702754〉

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